| 真空紫外光谱仪 |
| 波长范围（nm） |
光谱分辨率（nm） |
焦距(mm) |
型号 |
扫描 |
阵列探测器 |
成像 |
真空 |
超高真空 |
光谱仪光学设计 |
| 30 to 2,200 |
0.1 |
200 |
Monarch |
● |
● |
● |
|
● |
凹面像差矫正 |
| 30 to 1200 |
0.05 |
500 |
235 |
● |
● |
● |
|
● |
SN结构 |
| 105 to 20,000 |
0.04 |
670 |
207V |
● |
● |
● |
● |
● |
CT结构 |
| 30 to 1,200 |
0.015 |
1,000 |
225 |
● |
● |
● |
● |
● |
自聚焦正入射式 |
| 105 to 20,000 |
0.01 |
1,330 |
209V |
● |
● |
● |
● |
● |
CT结构 |
| 30 to 250 |
0.005 |
3,000 |
2253 |
● |
● |
● |
● |
● |
自聚焦正入射式 |
